Cleaning with CO2 snow blasting is based on several cleaning mechanisms, which are of varying importance depending on the application. The cleaning effect is based on thermal, mechanical and physical processes in the micro region of the surface. The thermal effects, due to different coefficients of thermal expansion between the impurity and the surface to be cleaned, lead to the removal of the impurity. The impurity is detached and transported away from the surface by the combined effects of sliding jet, oblique jet and impact jet processes acting on the impurity and the sublimation expansion of the CO2. In addition, oil and grease impurities are removed from the surface by the dissolving action of the carbon dioxide. The resultant cleaning is environmentally friendly and residue-free. Even sensitive and structured surfaces can be processed gently. CO2 snow blasting can achieve the highest cleaning qualities, so that completely particle- and germ-free surfaces are possible.